Problem and solution of designing an air bearing system

In this paper, we present the structure and design of an air bearing stage. First, a spherical air bearing system (SABS) is introduced in the alignment of nano-imprinting. Secondly, the eddy current is used to control the SABS over-coming the frictionless motion. Thirdly, an adaptive algorithm is designed for estimating the unknown model parameters. Finally, an experimental platform is setup and the proposed algorithm is tested.