SESES: a comprehensive MEMS modelling system

We report recent advances made in building an integrated MEMS (Micro Electro Mechanical Systems) CAD, modelling system using the framework of SESES. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation.