Defect Intelligent Sampling System

This paper describes a new paradigm of defect sampling, the Defect Intelligent Sampling System (Defect-ISS), which introduces a far more effective in-line defect inspection and process control method in a diverse product and technology node mass production environment. Three important benefits are realized with the implementation of Defect-ISS: (1) Sampling stability (2) Satisfactory coverage of products in line (3) Comprehensive inclusion of the process tools.