Development of 10 KΩ quantum Hall array resistance standards at NMIJ

An experimental device of quantum Hall array resistance standards (QHARS) with a nominal value close to 10 kΩ on the i = 2 plateau have been developed on a GaAs/AlGaAs hetero-substrate. This device consists of just 266 Hall bar elements that are connected by triple connection technique. Its nominal value has only 0.034 2 ppm differences from the integer value of 10
⁴
. This array device clearly shows the well-quantized 10 kΩ plateau (i=2).