Temperature dependence of Pd thin film cryo resistors

Cryo resistors based on Pd thin films were designed and investigated in temperature range 50 mK - 300 K. The resistors in the range 100 kΩ - 1.3 MΩ were fabricated using thermal evaporation technique. Minimum temperature coefficient, -0.4 (37)·10
^-6
/K, in temperature range 50 mK - 100 mK has been obtained for 20 nm thin film 560 kΩ resistor. Binary and decimal configuration of connection of resistive elements were used for flexible adjustment of resistance value.