Continuous-wave operation up to 36/spl deg/C of 1.3-μm GaInAsP-InP vertical-cavity surface-emitting lasers

We introduced ion-beam assisted deposition in order to improve the quality of Al
₂
O
₃
and SiO
₂
, which were used as part of the mirrors of 1.3-μm GaInAsP-InP vertical-cavity surface-emitting lasers (VCSELs). The refractive index of Al
₂
O
₃
was improved to 1.63 from 1.56 and the one of SiO
₂
increased to 1.47 from 1.45. Low-threshold room-temperature continuous-wave (CW) operation of 1.3-μm VCSEL with the improved mirrors was demonstrated. The threshold current was 2.4 mA at 20/spl deg/C. The CW operating temperature was raised to 36/spl deg/C, which is a record high temperature for 1.3-μm VCSEL.