High-dynamics low-cost flow control with solenoid actuator for ultra-high purity applications

This paper presents a non-invasive closed-loop flow control system in a compact design for high-purity or aggressive chemical applications. The novel topology with a solenoid activated valve and ultrasonic-based flow measurement permits precise flow control with rapid response time at a very low price. In the paper the mechanical setup, the power electronics, the implemented closed loop control as well as the measurement of flow and valve-stroke is discussed. Finally, the performance of the system is verified by a laboratory prototype.