Manufacturing and testing technology for a silicon piezoresistive microaccelerometer

This paper deals with, the manufacturing technology by silicon bulk micromachining for a MEMS accelerometer with piezoresistive detection as well as the vibration testing of the accelerometer structure by using the MSA-500 Micro System Analyzer, a measurement instrument for analysis and visualization of structural vibrations and surface topography in microstructures such as MEMS devices. The technological results, in correlation with the dynamic behavior of the analyzed microstructure, are discussed. These results will be taken into account for design optimization of the device.