System Configuration and Fabrication Technology for Distributed MEMS

The system configuration and printing-based fabrication technology of distributed MEMS are discussed using our research trials related to those aspects. Based on the concept of autonomous distributed system (ADS), we have constructed and operated a smart conveyer using micro nozzle arrays. We also applied printing technology to fabricate a kind of distributed MEMS, i.e. a flexible display consisting of movable Fabry-Perot interferometers.