A Batch Fabricated Elastomeric Actuator with Large out of Plane Displacement

Batch compatible laser micromachining of an elastomeric cantilever actuator composed of a polydimethylsiloxane (PDMS) bilayer (active/inactive) and soft-lithographically patterned conductive carbon grease electrodes is presented in this paper. Low actuation voltage and large out-of-plane displacement are unique characteristics of this new cantilever structure. An actuator which is 4mm long, 1mm wide, and 80μm thick can produce up to 1.2mm out of plane displacement and generate maximum force of 25μN when actuated by 450V.