Field theory analysis of electromagnetic field scattering at coplanar waveguide MIS discontinuities

This paper presents a rigorous field theory analysis of electromagnetic held scattering at discontinuities in semiconductor based coplanar waveguide (CPW) metal-insulator-semiconductor (MIS) transmission lines with laterally confined doping profile. Two types of the CPW MIS discontinuity structures are investigated: (a) a CPW through line with an abrupt transition from undoped to doped substrate and (b) the same as (a) but with an additional strip discontinuity of the CPW. The characterization of both types of discontinuites is important for application of CPW MIS slow-wave structures.