Absorption of SF/sub 6/, SF/sub 4/, SOF/sub 2/ and SO/sub 2/F/sub 2/ in the 115-220 nm region

Absorption coefficients k/sub e/(m/sup -1/.100 kPa/sup -1/) of SF/sub 6/ and of its main gaseous by-products SF/sub 4/, SOF/sub 2/ and SO/sub 2/F/sub 2/ were measured in the 115-220 nm region. The experiments were carried out at a temperature of 298 K and a spectral resolution of 0.1 nm over the wavelength range 115-118 nm for SF/sub 6/, 115-220 nm for SF/sub 4/, 120-195 nm for SOF/sub 2/ and 120-210 nm for SO/sub 2/F/sub 2/. The highest absorption coefficient values were obtained for SF/sub 4/ and the lowest for SF/sub 6/.