A novel broadband boundary element approach for RL-extraction in lossy 3D interconnects

A new methodology for inductance extraction in 3D interconnects is presented. Volumetric current density is cast into the form of the unknown surface current density weighted by the exponential function corresponding to the skin-effect field attenuation. The approach reduces governing magneto-quasi-static volumetric integral equation to an equivalent surface integral equation. Such reduction allows for accurate broadband boundary element formulation of the RL extraction problem.