Abstract:
This paper reports on the first demonstration of series tuning for lateral micromechanical oscillators and its application in a temperature-compensated 427MHz AlN-on-Si r...Show MoreMetadata
Abstract:
This paper reports on the first demonstration of series tuning for lateral micromechanical oscillators and its application in a temperature-compensated 427MHz AlN-on-Si reference oscillator. The sustaining amplifier is a 13mW tunable TIA implemented in 0.18μm CMOS that uses shunt-parasitic cancellation to increase the tuning by 12× to 810ppm. The tunable oscillator along with a 2mW on-chip temperature compensation circuit has reduced the overall frequency drift to 70ppm in -10°C to 70°C. The phase-noise of the oscillator reaches -82dBc/Hz at 1kHz offset with floor below -147dBc/Hz.
Published in: 2010 IEEE Radio Frequency Integrated Circuits Symposium
Date of Conference: 23-25 May 2010
Date Added to IEEE Xplore: 03 June 2010
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