Rayleigh and shear horizontal surface acoustic properties of (100) ZnO films on silicon

(100) ZnO films on silicon will excite Rayleigh SAWs along the z-axis and shear horizontal (SH) SAWs along the y-axis. Rayleigh SAW modes of (100) ZnO films on silicon have smaller film thickness ratios, higher phase velocities, and larger electromechanical coupling coefficient (K
²
) than the those of (002) ZnO films on silicon. This is special for Rayleigh mode 1, where the K
²
curve shows a maximum value of 3.37% at h/¿ = 0.28 and the velocity is 5258 m/s. This is special for SH mode 0, where the K
²
curve shows a maximum value of 3.3% at h/¿ = 0.28 and the velocity is 3242 m/s.