A 3MHz spoke gyroscope with wide bandwidth and large dynamic range

This paper reports on the design and characterization of a high-frequency silicon bulk acoustic wave (BAW) spoke gyroscope operating in air. The gyroscope described here operates at 3.12 MHz in a near mode-matched condition (without tuning) and has a -1 dB bandwidth of ~1.5 kHz. The device has a linear full-scale range in excess of 30,000°/sec with a sensitivity of 15.0 ¿V/°/sec using a 10 V DC polarization voltage. The wide bandwidth and large dynamic range of this device are beneficial for applications requiring rapid motion sensing.