Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10
^-3
¿m
^-1
, 1.18×10
^-3
¿m
^-1
and 3.26×10
^-4
¿m
^-1
for x, y, and z-direction, respectively.