Theoretical sensitivity evaluation of a shear-horizontal SAW based micro rate sensor

this paper presents a theoretical analysis on response mechanism of a micro rate sensor based on shear horizontal surface acoustic wave (SH-SAW) gyroscopic effect. The new SH-SAW propagating along the ST-90oX quartz substrate by composing heavy metal interdigital tranducers (IDTs) provides superior temperature stability, large acoustic velocity and higher electromechanical coupling factors. Using partial-wave analysis methods, the behavior of shear horizontal SAW propagating along pre-rotated ST-90°X quartz substrate was investigated. The angular detection sensitivity in the propagation path of SH-SAW was evaluated and the effect of the metal IDT electrode thickness on the sensor performance was also studied, optimal IDT electrode thickness was determined.