Optimization of Junction-Isolated Vertical npn and pnp BJTs in a Modular BiCMOS Smart-Power Process

Vertical bipolar transistors are added to CMOS processes in order to obtain superior analog and drive capabilities. If these transistors can be isolated, special applications like low-voltage designs for battery-operated circuits or amplifier designs for sensors become possible. We report on a modular 40 V BiCMOS process where junction-isolated vertical npn and pnp transistors have been added for smart-power purposes.