Demonstration of Super-collimation in SOI photonic crystal fabricated by 0.13µm CMOS technology

Near-perfect photonic crystal structure on 8' SOI wafer was fabricated through standard 0.13μm CMOS technology. Large scale super-collimation was demonstrated in the photonic crystal region which is coinciding with simulation result. The result represents a promising prospect of super-collimation waveguide on macroscopic optical connection.