A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter

This paper presents a MEMS resonator-based vacuum sensor with a low power transimpedance amplifier and PLL-based frequency-to-voltage converter. The MEMS resonator is fabricated in a CMOS-compatible process, and a 90 nm CMOS technology is used to design the integrated circuitry. The vacuum sensor has a range from 10 mbar to 1200 mbar and a resolution of less than 5 mbar. The simulated power consumption of the entire system is less than 520 ¿W from a 1 V supply.