Advances in pixel design and wafer fabrication for liquid crystal over silicon SLMs

In this paper we will discuss advances in silicon fabrication technology which have allowed the production of liquid crystal over silicon spatial light modulators (LCOS SLMs) with enhanced specification and performance. We will discuss advances in pixel circuit design and VLSI layout, for both DRAM and SRAM based pixels, which have resulted in higher pixel packing density and improved pixel performance. We will illustrate these advances using examples of our most recent SLM designs.