A method to measure the complex permeability of thin films at ultra-high frequencies

A swept frequency method for measuring the magnetic permeability of thin films for frequencies up to 2 GHz with a resolution at 1 GHz of /spl sim/0.1 /spl mu/m in permeance is described. It is based on the measurement of impedance of a strip loop loaded with the sample under test. The method employs a commercial impedance or network analyzer, is simple, and suitable for permeability measurements of thin magnetic films which are used in recording heads and microwave components.