High Performance Reduction Lenses for Microelectronic Circuit Fabrication

Data are presented for three families of objective lenses useful in making high resolution plates and improving the process of photoresist exposure. These lenses have 7 to 10 elements each, spherical surfaces only, and were designed with the aid of computers. Many of the lenses have been fabricated and these have confirmed the soundness of the design methods, assessment criteria, and manufacturing techniques.