Numerical modeling of an induction plasma installation including the generator state space model

A complete inductively coupled radio-frequency plasma installation is modeled. This installation includes an electrical generator coupled with a cylindrical inductor containing the plasma. The mathematical modeling of the generator with its triode uses a state space approach. A Runge-Kutta method is used to solve these differential equations. The electromagnetic equation of the inductor is solved by the moment method, whereas the electromagnetic equation of the plasma is solved by the finite difference method. The thermal equation of the argon plasma is solved by the control volume method. The simulations allow us to study the influence of the installation components on voltages, currents, dissipated powers and generator performances.