Deep micromachining of poly-ethylene terephthalate for plastic MEMS applications

This work demonstrates deep etching of poly-ethylene terephthalate (PET) substrates for plastic MEMS applications. Complex features such as flexible crack free spiral and serpentine structures are realized. As an application for this etching technique, micromachining of a deformation sensor and micromechanical pump with fully suspended cantilevers are presented.