Large core (/spl sim/60 μm) SOI multimode waveguides for optical interconnect

Multimode integrated optical waveguides, with single-crystal silicon as the core material and a core thickness as large as 60 μm, are fabricated on thick-film bond-and-etched-silicon-on-insulator substrates. The loss coefficient at the wavelength of 1310 nm is measured to be 0.8 dB/cm. The fabrication process is based on the mature silicon IC technology and is very cost-effective. A simple multimode waveguide coupler is demonstrated.