Flip-chip bonded 0.85-μm bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-μm bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-μm bottom-emitting VCSEL array, and confirm all pixels across the 8×8 VCSEL array operate at a f
₃
dB bandwidth of 2.6 GHz at only 4.2 mA.