A 2-D KLM Model for Disk-Shape Piezoelectric Transducers

Piezoelectric materials are widely used for many applications such as sensors, actuators. Today, their integration in microelectronics processes like CMOS requires the development of advanced realistic behavioral models. Until now, these models were limited to only one ceramic's operation mode, i.e., thickness or planar. Moreover, the robustness of piezo-electronic systems cannot be adequately addressed as long as models are not improved in particular by taking into account further real phenomena. This article proposes to merge, in a new KLM model, the two operation modes. It is demonstrated that the behavior of the proposed model is in very good agreement with the real ceramic behavior.