Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor

We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0-10 mL/min and with a back pressure of 0-75 kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The realization of the system is based on a smart combination of commercially available low cost fluidic components with a MEMS based thermal mass flow sensor of 1 ms response time.