Low leak rate mems valves for micro-gas-analyzer flow control

We present MEMS polysilicon microvalves for flow control of a rapid analytical microsystem (Micro-Gas-Analyzer, MGA). All valve components (boss, seat, springs, electrodes, and stops) are surface micromachined in the SUMMiT
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microfabrication process. The valves have been characterized at high flow rate when open (60 ml/min air), low leak rate when closed (<0.0025 ml/min Hydrogen, H2), and tunable closing pressures (1 to 35 psig). Active electrostatic valves have been shown to hold closed (voltage on) against a high pressure (>40 psig) for sample loading, open for gas chromatograph (GC) loading (voltage off), and reclose against low pressure 2-5 psig.