3DOF equivalent circuit model of a comb-drive actuator

We have derived a 3DOF (degree of freedom) mechanical equivalent circuit of a comb-drive actuator from Lagrange equation and applied it to simulation of an asymmetrical comb-drive actuator, and we can obtain that experimental data is in good agreement with the simulation. We also mentioned the quadric model of a comb-drive actuator which should be used under no DC bias operation. Using these models complicated MEMS devices are represented fully by an electrical equivalent circuit including mechanical parts, and can be simulated only by electrical simulator such as SPICE.