Operating Range Optimization of a Slider With an Integrated Microactuator (SLIM) for Hard Disk Drives

The paper describes the tests performed to determine the characteristics of four various leaf springs, as well as the evaluation of the mounting platform/chiplet motion as a function of the excitation current. For the leaf spring evaluation, a nanoindenter (Hysitron Tribo Indenter) was used. To determine the variation of the air gap as a function of the excitation current, optical microscopy as well as laser Doppler vibrometry (LDV) was applied.