The technical study of prearing Al2O3 flinty thin film on the engine monomer pump test sample 38CrMoAl surface

Monomer pump is an engine's key component in the Altogether track feed oil system. When engine running, the monoblock pump is under high temperature, high pressure and easy to wear condition. Facing coat of monoblock pump is essential to enhance the engine's lifetime by elevating its resistance to high temperature, wear and corrosion. In this paper, the sputtering power, sputtering time, total sputter barometric pressure, as well as the settling rate, the specific flux of Ar/O
2
inlet and other technological parameters which can affect the rigidity of Al
2
O
3
film in the process of making α-Al2O3 films using magnetron sputtering method are discussed in detail. The obtained α-Al
2
O
3
has very high rigidity, which will enhance the monomer pump surface wearability, thermostability, and will prevent its corrosion, thus will enhance the engine's life.