CMOS-integrated small-capacitance germanium waveguide photodetector for optical interconnects

Compact germanium waveguide photodetector with 38 fF capacitance, 40 Gbps bandwidth and 0.4 A/W responsivity is demonstrated. High-quality Ge-on-insulator single-crystalline layer was monolithically integrated into front-end CMOS process by lateral seeded crystallization.