PZT-film compositional development and physical properties

The preparation-structure-property relationships on relatively thick (0.5...1.5 /spl mu/m) polycrystalline PZT-films have been studied. The PZT-films were prepared by sol-gel processing from high molarity precursor sols (>2 M) on Pt-metallized polycrystalline Al/sub 2/O/sub 3/-substrates. Special emphasis was given to the dependence of film properties on Zr/Ti-ratio, Pb-concentration, and thickness. Particularly, new approaches are necessary to deduce the familiar material data of compact PZT on films. Laser induced surface acoustic waves proved to be useful to deduce mechanical and geometrical parameters. Electrical scanning force microscopy made nanoscaled poling experiments possible in areas less than 300 nm/spl times/300 nm. In order to qualify the material system for application in the printing process the investigations were directed to higher thickness of films, enlarged coating area and improvement of material properties.