Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films

Fine micropatterns with linewidth of 0.35 /spl mu/m were fabricated by irradiation with an electron beam of metal naphthenate films, being precursors of ferroelectric oxides, and development with a solvent. Relatively large patterns were crystallized into the single phase Bi/sub 4/Ti/sub 3/O/sub 12/ with c-axis orientation by successive heat-treatment at 800/spl deg/C. Micropatterns with linewidth of 1 /spl mu/m were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment of PZT and Bi/sub 4/Ti/sub 3/O/sub 12/ thin films formed by the dipping pyrolysis method, which is the base of this patterning process. Good ferroelectric properties were exhibited; the remanent polarization P/sub r/ and the coercive field E/sub c/ were 24 /spl mu/C/cm/sup 2/ and 39 kV/cm for PZT, and 1.6 /spl mu/C/cm/sup 2/ and 24 kV/cm for Bi/sub 4/Ti/sub 3/O/sub 12/, respectively.