The signal interrogation technology of MEMS optical fiber pressure sensor

This paper describes the Microelectromechanical Systems (MEMS) optical fiber pressure sensor signal interrogation systems. The white-light interferometry system, component test system (CTS) and self-calibrated interferometric intensity based (SCIIB) system are introduced. The signal of the optical fiber pressure sensor processing schemes is presented. With the system the cavity of the MEMS optical fiber pressure sensor is measured with high resolution by fringe analysis. The dynamic range of the measurement is large, which is from several microns to millimeters.