Process improvements for large area polycrystalline silicon buried contact solar cell sequence

One of the objectives of ongoing research at Solarex is to evolve process sequences that are compatible with high volume production, while reducing the processing cost of buried contact cells. In the paper, the impact of phosphorus gettering and the application of an antireflection coating with a higher refractive index than that of SiO/sub 2/ are discussed. Substantial improvement in the efficiency of the buried contact cells due to phosphorus gettering and incorporation of titanium dioxide antireflection coating is reported.