The low temperature deposition of ICB-grown CuInSe/sub 2/ thin films [solar cells]

Superstrate-type solar cells were successfully fabricated for the first time using CuInSe/sub 2/ thin films prepared by the ICB (ionized cluster beam) technique. The substrate temperature was as low as 300/spl deg/C. The films were characterized by EPMA, X-ray diffraction and PL spectrum. SEM micrographs and photovoltaic properties were also investigated on the solar cells. Results showed nearly stoichiometric composition with grain size about 1 /spl mu/m. The superstrate-type solar cells showed a conversion efficiency of 2.06%.