Soft UV-nanoimprint lithography for the fabrication of frequency selective components

In this paper, we demonstrate the use of the soft UV-NIL in two important applications. We show, first time in the world, soft UV-NIL based process for fabricating a distributed feedback laser diode (DFB-LD) and illustrate a fabrication process for a nanostructured waveguide in LiNbO
₃
- crystal intended for frequency conversion.