100GHz LIGA-fabricated coupled-cavity device

This abstract describes the design, fabrication and testing of microfabricated 100 GHz coupled-cavity backward wave oscillator (CCBWO), which is operated in space harmonics -1 at 12 kV and 50 mA with round-beam radius 0.18 mm. The RF performance has studied using 3-D electromagnetic field simulator and particle-in-cell code. The cold-test assembly has been fabricated. The complete device assembly for hot-test is under fabrication. Experimental results will be presented.