Periodic large-area metallic split-ring resonator metamaterial fabrication based on shadow nanosphere lithography

In this paper, we show that this large-area, high-coverage method for the fabrication of optical split-ring resonator gold metamaterials allows for substantial tunability of the structural dimensions and their respective resonance frequencies. We demonstrate excellent agreement of the adjustable parameters, such as the inner and outer ring diameter, the opening gap angle, as well as the metal thickness and the SRR period, with a simplified geometrical model.