The dynamic thermal behavior of silicided polysilicon under hight current stress event

A simple dynamic thermal model considering Joule-heating, heatconduction and energy conservation has been developed. It fits the dynamic thermal behavior of the silicided polysilicon under the high current stress event very well. The criterion to induce the DC resistance change of a silicided polysilicon resistor is determined by the phase transform temperature (PTT) of the silicide polysilicon.