Resonant langasite microsensor for atomic force microscopy

Quartz length-extension resonators have already been used to get atomically-resolved imaging by frequency-modulation atomic force microscopy. New piezoelectric materials such as Langasite could be appropriate for this application. Theoretical study is reported on length extension resonators in this material. In this paper, an attempt to fabricate micro resonators in Langasite temperature-compensated cuts is prospected. The pointed tip of the micromachined cantilever can be used for atomic force microscopy applications.