Polarimetric Michelson interferometer for sub-nanometric scale positionning control

Step by step displacements control scheme based on polarimetric interferometer is proposed. A repeatability of 470 pm is obtained on back and forth displacements over micrometer range using piezoelectric actuators. The error induced on the position due to a residual ellipticity of the laser beam is investigated. Such method could be extended over millimeter range displacements leading to numerous applications in nanometrology.