Prediction of chemical consumption in semiconductor fabrication

A system to predict chemical consumption in semiconductor fabrication is presented. The model is a bottom-up approach based on the routes and the associated process steps. Consumptions are modeled as variable and fixed in order to enable the analysis of product mix and workload dependencies. Additionally it is shown how the huge amount of data needed to feed such a detailed model can be acquired and how the model is implemented in the 300 mm fab of IBM in East Fishkill, NY.