Moore's Law Past 32nm: Future Challenges in Device Scaling

This paper explores the challenges facing process generations past the 32 nm technology node and speculates on what new solutions will be needed. The challenges facing planar and multiple-gate devices are compared and contrasted. Resistance and capacitance challenges are reviewed in relation to past history and on-going research. Key enhancers such as high-k metal-gate (HiK-MG), substrate and channel orientation, as well as NMOS and PMOS stress are discussed in relation to the challenges of the coming transistor generations.