SOI digital accelerometer based on pull-in time configuration

We aim to present the principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on thin silicon-on-insulator (SOI) substrate. The presented device features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital electronic circuitry. The measurements showed a pull-in voltage of 2.7 V and a pull-in time from 0 to 1 G to be 3.2 mus.