A silicon MOS process for integrated RF power amplifiers

A silicon-based technology is presented which integrates passive components with a silicon power MOSFET for use in integrated power amplifiers at UHF, VHF, and RF frequencies. This low-cost process incorporates capacitors, inductors, resistors, ground vias, transmission lines, and an ESD protection diode. A design library containing models and layouts for the active and passive components was compiled.